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Engineering of LiNbO3 thin films for next generation acoustic applications

Ausrine Bartasyte

à 11h, en salle C. BROT

Over the past five decades, LiNbO3 and LiTaO3 single crystals and thin films have been studied intensively for their exceptional acoustic, electro-optical, and pyroelectric and ferroelectric properties. Today, LiNbO3 single crystals in electro-optics are equivalent to silicon in electronics, and about 70% of radio-frequency (RF) filters, based on surface acoustic waves, are fabricated on these single crystals. These materials in the form of thin films are needed urgently for the development of the next-generation of high-frequency and/or wide-band RF filters or tuneable frequency filters adapted to the fifth generation of infrastructures/networks/communications. The integration of LiNbO3 films in guided nanophotonic devices will allow higher operational frequencies, wider bandwidth, and miniaturized optical devices in line with improved electronic conversion. Here, the challenges and the achievements in the epitaxial growth of LiNbO3 thin films and their integration with silicon technology and to acoustic devices will be discussed in detail. The resonances at 3.7 GHz and 4.8 GHz with low insertion losses and relatively high quality factors were measured in single-port resonators with standard IDT wavelengths and based on Z-LiNbO3 films. The resonances at 10 GHz in thin-film based devices were demonstrated experimentally, as well.